Abstract

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ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.


General information 

  • Status
     : Published
    Publication date
     : 2017-02
  • Edition
     : 1
    Number of pages
     : 24
  • Technical Committee
     : ISO/TC 206 Fine ceramics
  • ICS
     :
    81.060.30 Advanced ceramics

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