Abstract
PreviewISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
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Status: Under developmentYou can help develop this draft international standard by contacting your national member
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Edition: 2Number of pages: 24
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- ICS :
- 81.060.30 Advanced ceramics
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Format | Language | |
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std 1 61 | ||
std 2 61 | Paper |
- CHF61
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