ISO 22278:2020
p
ISO 22278:2020
73015

Abstract

 Preview

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.


General information 

  •  : Published
     : 2020-08
  •  : 1
     : 29
  •  : ISO/TC 206 Fine ceramics
  •  :
    81.060.30 Advanced ceramics

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