Status : Published (Under review)

This standard was last reviewed and confirmed in 2019. Therefore this version remains current.
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Abstract

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

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General information

  • Status
     : Published
    Publication date
     : 2003-07
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 1
    Number of pages
     : 5
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
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This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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