Abstract
This international standard specifies a method of X-ray fluorescence (XRF) spectrometry for measuring amount-of-substance of deposited materials which can derive film thickness or relative film density of fine ceramic coatings or metal films on a substrate.
General information
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Status: Under developmentStage: New project registered in TC/SC work programme [20.00]
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Edition: 1
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Technical Committee :ISO/TC 206
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