Abstract
This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.
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General information
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Status: PublishedPublication date: 2022-11Stage: International Standard published [60.60]
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Edition: 3Number of pages: 17
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Technical Committee :ISO/TC 201/SC 4ICS :71.040.40
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Life cycle
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Previously
WithdrawnISO 14606:2015
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