This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
Status: PublishedPublication date: 2022-07
Edition: 1Number of pages: 15
Technical Committee: ISO/TC 202/SC 3 Analytical electron microscopy
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