Abstract
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
General information
-
Status: PublishedPublication date: 2022-07Stage: International Standard published [60.60]
-
Edition: 1Number of pages: 15
-
Technical Committee :ISO/TC 202/SC 3ICS :71.040.50
- RSS updates
Read sample
Preview this standard in our Online Browsing Plateform (OBP)
Life cycle
Got a question?
Check out our FAQs
Customer care
+41 22 749 08 88
Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)