ISO 24639:2022

Published (Edition 1, 2022)

ISO 24639:2022

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Abstract

This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.

This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.

General information

Status
: Published

Publication date
: 2022-07

Stage
: International Standard published [60.60]
Edition
: 1

Number of pages
: 15
Technical Committee :
ISO/TC 202/SC 3

ICS :
71.040.50
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