Reference number
ISO 16129:2018
© ISO 2025
International Standard
ISO 16129:2018
Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
Edition 2
2018-11
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Published (Edition 2, 2018)

ISO 16129:2018

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CHF 98
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Abstract

This document is designed to allow the user to assess, on a regular basis, several key parameters of an X‑ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently.

Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X‑ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document.

The document is intended for use with commercial X‑ray photoelectron spectrometers equipped with a monochromated Al Kα X‑ray source or with an unmonochromated Al or Mg Kα X‑ray source.

General information

  • Status
     : Published
    Publication date
     : 2018-11
    Stage
    : Close of review [90.60]
  • Edition
     : 2
    Number of pages
     : 18
  • Technical Committee :
    ISO/TC 201/SC 7
    ICS :
    71.040.40 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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