ISO 22493:2014
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ISO 22493:2014
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Abstract  Preview

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.


General information 

  •  :  Published
     : 2014-04
  •  : 2
     : 20
  •  : ISO/TC 202/SC 1 Terminology
  •  :
    37.020 Optical equipment
    01.040.37 Image technology (Vocabularies)

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std 2 118 Paper
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