Abstract
This International Standard provides procedures for electron microprobe elemental-mapping analysis using
wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally
across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is
assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,
the calibration method, the correlation method and the matrix correction method.
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General information
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Status: PublishedPublication date: 2012-03Stage: International Standard confirmed [90.93]
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Edition: 1Number of pages: 10
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Technical Committee :ISO/TC 202/SC 2ICS :71.040.50
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