Reference number
ISO 16700:2004
ISO 16700:2004
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Edition 1
2004-03
Withdrawn
ISO 16700:2004
30420
Withdrawn (Edition 1, 2004)

Abstract

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

General information

  •  : Withdrawn
     : 2004-03
    : Withdrawal of International Standard [95.99]
  •  : 1
     : 16
  • ISO/TC 202/SC 4
    37.020 
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Life cycle

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