Reference number
ISO 24688:2022
International Standard
ISO 24688:2022
Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
Edition 1
2022-07
Read sample
ISO 24688:2022
79454
Published (Edition 1, 2022)

ISO 24688:2022

ISO 24688:2022
79454
Language
Format
CHF 63
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Abstract

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

General information

  •  : Published
     : 2022-07
    : International Standard published [60.60]
  •  : 1
     : 8
  • ISO/TC 107/SC 9
    25.220.01 
  • RSS updates

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