International Standard
ISO 13083:2015
Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Reference number
ISO 13083:2015
ISO 13083:2015
Edición 1
2015-08
2015-08
© ISO 2024
International Standard
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ISO 13083:2015
52691
No disponible en español
Publicado
(Edición 1, 2015)
Esta norma se revisó y confirmó por última vez en 2022.
Por lo tanto, esta versión es la actual.
Resumen
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2015-08Etapa: Norma Internacional confirmada [90.93]
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Edición: 1Número de páginas: 14
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Comité Técnico :ISO/TC 201/SC 9ICS :71.040.40
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