Resumen
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
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Informaciones generales
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Estado: PublicadoFecha de publicación: 2003-07Etapa: Norma Internacional confirmada [90.93]
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Edición: 1Número de páginas: 5
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Comité Técnico :ISO/TC 201/SC 6ICS :71.040.40
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