IEC/TR 63258:2021
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IEC/TR 63258:2021
75422

Status : Published

en
Format Language
std 1 40 PDF
std 2 40 Paper
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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

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General information

  •  : Published
     : 2021-03
    : International Standard published [60.60]
  •  : 1
     : 16
  • ISO/TC 229
    07.120 
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