This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Status: PublishedPublication date: 2019-03
Edition: 1Number of pages: 21
Technical Committee: ISO/TC 213 Dimensional and geometrical product specifications and verification
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