ISO 16700:2016
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ISO 16700:2016
65375

Abstract

 Preview

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.


General information 

  •  :  Published
     : 2016-08
  •  : 2
     : 18
  •  : ISO/TC 202/SC 4 Scanning electron microscopy
  •  :
    37.020 Optical equipment

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